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昆山熙日机械设备有限公司
昆山熙日机械设备有限公司
thyrcont图拉特真空计VSH89E 
The digital combination transducer VSH (Pirani/hot cathode) with EtherCAT Interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
描述
Wide range sensor Pirani / Bayard Alpert
Pirani with extended range allows operation of hot cathode at lower pressure and increases lifetime
Excellent accuracy and repeatability
Bayard-Alpert with blowing resistant, yttrium coated double filament, insensitive against inrush of air
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
应用
Coating plants and vapor deposition
Sputtering plants
Analysis technology
Measuring and controlling in the fine and ultrahigh vacuum range
Vacuum furnaces
Process engineering
Space simulation chambers
技术参数
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 4.8 x 6.9 x 1.46 cm |
| MEASURING PRINCIPLE | Pirani / Bayard Alpert, depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass |
| MEASUREMENT RANGE | 1000 – 5e-10 mbar (750 – 5e-10 Torr), max. overpressure 4 bar abs. |
| ACCURACY | 1000 – 10 mbar: < 30 % from reading 10 – 1e-8 mbar: < 10 % from reading |
| REPEATABILITY | ±2 % (10 – 1e-2 mbar), 5% (1e-2 – 1e-8 mbar) |
| RESPONSE TIME | < 200 ms (2 s while switching BA emission current) |
| EMISSION CURRENT | Automatic switching 10 µA, 100 µA, 1 mA, 2 mA |
| DEGAS | Ohmic heating of the anode |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| POWER CONSUMPTION | Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 180°C at the flange (electronic detached) |
| OUTPUT SIGNAL | 0 – 10 VDC, measuring range 1.219 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 40 CF-F |
| PROTECTION CLASS | IP54 |
vshe.pdf
man_vsh-de-en-171005-1.pdf
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