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昆山熙日机械设备有限公司
昆山熙日机械设备有限公司
thyrcont图拉特真空计VSM78E
The digital combination transducer VSM (Pirani/cold cathode) with EtherCAT interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
描述
Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
应用
Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces
技术参数
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASURING PRINCIPLE | Pirani / inverted magnetron, both depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| MEASUREMENT RANGE | 1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs. |
| ACCURACY | 1000 – 10 mbar: < 30 % from reading 10 – 2e-3 mbar: < 10 % from reading 2e-3 mbar – 1e-8 mbar: < 25% from reading |
| REPEATABILITY | 10 – 1e-2 mbar: Approx. ±2% from reading, 1e-2-1e-8 mbar: Approx. ±7% from reading |
| RESPONSE TIME | 200 ms (1s for activating the cold cathode) |
| CATHODE VOLTAGE | Max. 2.5 kV |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | not available |
| VACUUM CONNECTION | DN 40 ISO-KF |
| PROTECTION CLASS | IP54 |
vsme.pdf
man_vsm-de-en-171005.pdf
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