详细介绍
6DD1641-0AB0
6DD1641-0AB0
0 引言
随着PC(Personal Computer)的发展和普及,采用PC+运动控制卡作为上位控制将是运动控制系统的一个主要发展趋势。这种方案可充分利用计算机资源,用于运动过程、运动轨迹都比较复杂,且精度、柔性比较强的机器和设备。由于光刻机对于精度的要求特别高,因此本系统采用了PC+PMAC开放式多轴运动控制器的控制方式。即将PMAC运动控制卡插进PC机的标准插槽中作实时控制,而PC机作为人机界面和系统治理的上位机。
1 系统硬件结构
1.1 PMAC结构与原理
PMAC是一种开放式可编程多轴运动控制器 ,它采用 Motorola DSP 56001 数字信号处理2器作为 CPU ,其结构如图1所示。PMAC 适应多种硬件操纵平台 ,具有 PC、STD、VME、PCI、104 总线及串口脱机运行的功能 ,方便用户选用适合自己的主机。PMAC 适用于所有电动机 ,包括普通的交(直)流电动机、交(直)流伺服电动机、步进电动机、直线电动机等 ,对不同电动机 ,PMAC可提供相应的控制信号。
PMAC能够支持多达256个运动程序。任意坐标系在任何时候都可以执行这些程序中的任意一个,即使另外的坐标系正在执行同样的程序。PMAC能够同时执行和该卡上坐标系数目一样多的运动程序。一个运动程序能够将任何一个其它的运动程序调用作为子程序,可以带变元,也可以不带变量。
图1 PMAC结构图
1.2光刻机控制系统硬件结构及工作原理
PMAC运动控制卡上的CPU与PC机的CPU构成主从式双CPU控制模式:上位机PC机的CPU可以专注于人机界面、实时监控和发送指令等系统治理工作;下位机PMAC卡上的CPU用来实时处理所有运动控制的细节:升降速计算、行程控制、多轴插补等,无需占用PC机资源。
同时PMAC运动控制卡还提供了功能强大的运动控制软件库:C语言运动库、Windows DLL动态链接库等,能更快、更有效地解决复杂的运动控制题目。
PMAC卡与PC机之间有ISA总线和双端口RAM两种通讯方式。其中主机与PMAC卡主要通过总线通讯,即主机到的地址往PMAC卡。
PMAC卡与电机则主要通过DPRAM进行通讯。DPRAM用来与PMAC进行快速的数据和命令通讯。在向PMAC卡写数据时通常用于在实时状态下快速的位置数据和旋转程序信息的重复下载。在从PMAC卡读数据时通常用于重复快速地获得状态信息。比如电机状态,位置,速度,跟随误差等的数据可不停地更新并被PLC程序或被PMAC自动地写进DPRAM。
由于通过DPRAM进行的数据存取不需要经过通讯口发送命令和等待响应,所以响应速度非常快。
图2光刻机控制系统硬件图
2系统的软件部分
PMAC卡本身自带一个PEWIN32执行软件,该软件能对系统进行控制和测试,创建和治理PMAC应用系统,提供用户终端界面,设置系统参数,编写系统运动程序。因此,用户可以先编写程序,再下载到PMAC卡中运行。
本文采用了PMAC运动程序以及PLC程序相结合的方法。为了使光刻的图案美观,清楚,我们用激光器刻以圆点的形式进行打点。偶数行与奇数行错开半个圆,使每个圆都互相外切。这样刻出的图形才会更加紧凑,不会出现漏点情况。
运动程序部分:
&1
#1->Z #2->Y #4->X
M1->Y: $FFC2, 14, 1
M2->Y: $FFC2, 14, 1
M401->X: $C00D, 0, 24 S
M402->X: $C005, 0, 24, S
OPEN PROGRAM 1 CLEAR
INC
TA200
TS99
F50000
……
PLC程序部分:
&n
bsp; OPEN PLC 1 CLEAR
M1=0
Q6=M401
IF(Q1=0)
Q3=Q6-Q5
IF(Q3>900*Q9+450)
M2=1
Q9=Q9+1
ELSE
M2=0
ENDIF
Q10=8889
ENDIF
……
3 结束语
本文通过PMAC卡在光刻机控制系统的实际应用,介绍了一种运动程序与PLC程序相结合的方法,控制光刻机的运动。该方法已经被某公司的所实际应用,起到了很好的经济效益。
S
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